Confocal scanning microscope

ABSTRACT

A confocal scanning microscope including: an objective system (second objective lens  23  and objective lens  24 ) illuminating a sample SA with illumination light; a scanning mechanism  31  scanning the sample SA to obtain an intensity signal; and a scanning optical system  32  provided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a division of application Ser. No. 12/632,007 filedDec. 7, 2009, which is a continuation of International Application No.PCT/JP2008/063087 filed Jul. 15, 2008.

TECHNICAL FIELD

The present invention relates to a confocal scanning microscope.

BACKGROUND ART

A confocal scanning microscope system taking measures to avoid problemscaused by lateral chromatic aberration of the objective lens has beenknown. There have been disclosed, for example, a configuration in whichlateral chromatic aberration is reduced by a whole system combining ascanning optical system with an objective lens system such that lateralchromatic aberration of the objective lens system is canceled out by ascanning optical system provided between the objective lens system and ascanning mechanism (see, for example, Japanese Patent ApplicationLaid-Open No. 5-72481), and a configuration in which effects of lateralchromatic aberration generated in different wavelength regions arereduced by providing a plurality of correction optical systemscorresponding to respective different wavelength regions (see, forexample, Japanese Patent Application Laid-Open No. 5-341192).

In a recent objective lens, lateral chromatic aberration is corrected toan extent that there are practically no problems over relatively largewavelength region, so that only a specific wavelength region(ultraviolet wavelength region) where lateral chromatic aberration isnot corrected becomes a problem. The configuration disclosed in JapanesePatent Application Laid-Open No. 5-72481 cannot correct lateralchromatic aberration in this specific wavelength region, and theconfiguration disclosed in Japanese Patent Application Laid-Open No.5-341192 becomes complicated since a plurality of correction opticalsystems have to be used.

DISCLOSURE OF THE INVENTION

The present invention is made in view of the above-described problems,and has an object to provide a confocal scanning microscope capable ofcorrecting lateral chromatic aberration generated at a certainwavelength region of the objective lens system by a scanning opticalsystem.

According to a first aspect of the present invention, there is provideda confocal scanning microscope comprising: an objective optical system(for example, the second objective lens 23 and the objective lens 24 inthe embodiment) having a function to illuminate a sample withillumination light; a scanning mechanism that scans a surface of thesample so as to obtain a light intensity signal from the sample; and ascanning optical system that is provided between the scanning mechanismand the objective optical system; the scanning optical system beingcomposed of, in order from the scanning mechanism side, a first lensgroup having positive refractive power, a second lens group havingnegative refractive power, and a third lens group having positiverefractive power, the third lens group having two chromatic aberrationcorrection portions each formed by a positive lens and a negative lensor a negative lens and a positive lens adjoining each other, and when Vhis defined by the following expression:Vh=1000×{(nh−nd)/(nd−1)}where nd denotes a refractive index at d-line, and nh denotes arefractive index at h-line of an optical material constituting a lens,the following conditional expression (1) or (1A) being satisfied:V31>V32 and V33<V34  (1)orV31<V32 and V33>V34  (1A)where V31 denotes Vh value of the positive lens constituting a chromaticaberration correction portion being disposed to the scanning mechanismside among two chromatic aberration correction portions in the thirdlens group, V32 denotes Vh value of the negative lens constituting thelast mentioned chromatic aberration correction portion, V33 denotes Vhvalue of the positive lens constituting a chromatic aberrationcorrection portion being disposed to the objective optical system side,and V34 denotes Vh value of the negative lens constituting the lastmentioned chromatic aberration correction portion.

In the first aspect of the present invention, it is preferable that thesecond lens group has a chromatic aberration correction portion that isformed by a positive lens and a negative lens adjoining each other, andthe following conditional expression (2) is satisfied:V21<V22  (2)where V21 denotes a Vh value of the positive lens forming the chromaticaberration correction portion, and V22 denotes a Vh value of thenegative lens forming the last mentioned chromatic aberration correctionportion.

In the first aspect of the present invention, it is preferable that thefollowing conditional expressions (3) and (4) are satisfied:−1.5<f/f2<0  (3)0.8<f/f3<1.8  (4)where f2 denotes a focal length of the second lens group G2, f3 denotesa focal length of the third lens group G3, and f denotes a focal lengthof the scanning optical system, and

wherein, with respect to V31, V32, V33, V34, V21 and V22, when V31>V32and V33<V34,

the following conditional expressions (5), (6) and (7) are satisfied:−30<V21−V22<−15  (5)+5<V31−V32<+15  (6)−30<V33−V34<−10,  (7)

when V31<V32 and V33>V34,

the following conditional expressions (5), (6A) and (7A) are satisfied:−30<V21−V22<−15  (5)−30<V31−V32<−10  (6A)+5<V33−V34<+15  (7A).

In the first aspect of the present invention, it is preferable that whenV31>V32 and V33<V34, the following conditional expression (8) issatisfied:−0.1<N31−N32<+0.1  (8),

and when V31<V32 and V33>V34, the following conditional expression (8A)is satisfied:−0.1<N33−N34<+0.1  (8A)where N31 denotes a refractive index at d-line of the positive lensconstituting the chromatic aberration correction portion being disposedto the scanning mechanism side among the two chromatic aberrationcorrection portions in the third lens group, N32 denotes a refractiveindex at d-line of the negative lens constituting the last mentionedchromatic aberration correction portion, N33 denotes a refractive indexat d-line of the positive lens constituting the chromatic aberrationcorrection portion being disposed to the objective optical system side,and N34 denotes a refractive index at d-line of the negative lensconstituting the last mentioned chromatic aberration correction portion.

In the first aspect of the present invention, it is preferable that thefollowing conditional expression (9) is satisfied:SD/f<0.85  (9)where SD denotes a distance along an optical axis between the scanningmechanism side surface of the first lens group and the objective opticalsystem side surface of the third lens group, and f denotes a focallength of the scanning optical system.

When the confocal scanning microscope according to the present inventionis constructed as described above, lateral chromatic aberration of theobjective optical system generated in a specific wavelength region canbe corrected by the scanning optical system constituting the confocalscanning microscope.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a construction of a confocal scanningmicroscope equipped with a scanning optical system according to thepresent invention.

FIG. 2 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 1.

FIG. 3 shows various aberrations of the scanning optical systemaccording to Example 1.

FIG. 4 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 2.

FIG. 5 shows various aberrations of the scanning optical systemaccording to Example 2.

FIG. 6 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 3.

FIG. 7 shows various aberrations of the scanning optical systemaccording to Example 3.

FIG. 8 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 4.

FIG. 9 shows various aberrations of the scanning optical systemaccording to Example 4.

FIG. 10 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 5.

FIG. 11 shows various aberrations of the scanning optical systemaccording to Example 5.

FIG. 12 is a diagram showing a lens configuration of a scanning opticalsystem according to Example 6.

FIG. 13 shows various aberrations of the scanning optical systemaccording to Example 6.

EMBODIMENT FOR CARRYING OUT THE INVENTION

An embodiment of the present invention is explained below with referenceto accompanying drawings. At first, a construction of a confocalscanning microscope 1 equipped with a scanning optical system accordingto the present invention is explained with reference to FIG. 1. Theconfocal scanning microscope 1 is mainly composed of a first convergingoptical system 2 for converging illumination laser light from a lightsource unit 6 onto a sample SA, a scanning device 3 that deflects laserlight converged on the sample SA to scan on the sample SA, a lightdetector 5 that detects a light intensity signal from the sample SA, anda second converging optical system 4 that leads light from the sample SAto the light detector 5.

The first converging optical system 2 is composed of a collimator lens21 that converts laser light (bundle of rays) emanated from the lightsource unit 6 into parallel light, a dichroic mirror 22 that reflectslaser light from the collimator lens 21 toward the sample SA, and asecond objective lens 23 and an objective lens 24 that converge laserlight reflected by the dichroic mirror 22 onto the sample SA.

The second objective lens 23 is provided in a body tube portion 11 of amicroscope body 10, and the collimator lens 21 and the dichroic mirror22 are provided in a microscope case 12 provided upper portion of thebody tube 11. The light source unit 6 and the microscope case 12 areconnected by an optical fiber 69 using connector portions C3 and C4.

The scanning device 3 is composed of a scanning mechanism 31 having agalvanometer mirror (not shown) and a scanning optical system 32, andprovided between the dichroic mirror 22 and the second objective lens 23in the microscope case 12. The second converging optical system 4 iscomposed of the objective lens 24, the second objective lens 23, a totalreflection mirror 42 for reflecting fluorescence from the sample SA, anda first converging lens 41 that converges fluorescence reflected by thetotal reflection mirror 42 onto a light blocking plate 52 having apinhole 51 in the light detector 5. The total reflection mirror 42 andthe first converging lens 41 are disposed upward of the dichroic mirror22 and the collimator lens 21 in the microscope case 12.

The light detector 5 is composed of the light blocking plate 52 havingthe pinhole 51, an optical fiber 53 on which the light (fluorescence)passed through the pinhole 51 is incident, and a light detection unit 55that detects light (fluorescence) passed through the pinhole 51 and theoptical fiber 53. The light blocking plate 52 is disposed in themicroscope case 12, and the optical fiber 53 is connected to themicroscope case 12 and the light detection unit by means of therespective connectors C1 and C2. A processing unit 57 is electricallyconnected to the light detection unit 55 through a cable 56, and on thebasis of detected signal detected by the light detection unit 55, theimage of the sample SA is processed by the processing unit 57, and theobservation image of the sample SA obtained by the processing unit 57 isdisplayed on an unillustrated monitor. Incidentally, illumination lightemanated from the scanning device 3 is temporally converged on an imageplane 13 and converged again by the second objective lens 23 and theobjective lens 24 on the sample SA, so that the scanning surface of thesample, the image plane 13 and the pinhole 51 are conjugate relationwith each other.

In order to correct lateral chromatic aberration generated at thespecific wavelength region (ultraviolet wavelength region) in theobjective lens 24, the scanning optical system 32 generates lateralchromatic aberration in ultraviolet wavelength region to that extent ofabout the same amount of lateral chromatic aberration as that generatedby the objective optical system composed of the objective lens 24 andthe second objective lens 23. In a recent objective lens, in particular,in an apochromat objective optical system, lateral chromatic aberrationis excellently corrected over entire visible wavelength region. However,in fluorescence observation, as wavelength region of excitation lightbecomes shorter wavelength region (ultraviolet wavelength region), itbecomes difficult to correct lateral chromatic aberration fromultraviolet wavelength region to entire visible wavelength region. Thetrend is conspicuous in a portion of an oil-immersion type high-NAobjective optical system. Accordingly, in the scanning optical system 32according to the present embodiment, lateral chromatic aberration iscorrected in ordinary manner in the visible wavelength region wherelateral chromatic aberration of the objective optical system does notbecome an issue, and corrected together with the objective opticalsystem in the ultraviolet wavelength region where lateral chromaticaberration becomes an issue.

Then, a characteristic of the above-mentioned scanning optical system 32is explained with reference to FIG. 2. Incidentally, FIG. 2 correspondsto Example 1 described later. The scanning optical system 32 accordingto the present embodiment is composed of, in order from the scanningmechanism 31 side, a first lens group G1 having positive refractivepower, a second lens group G2 having negative refractive power, and athird lens group G3 having positive refractive power. The first lensgroup G1 is composed of a single positive lens L111, the second lensgroup is composed of a positive lens L121 and a negative lens L122, andthe third lens group G3 is composed of a positive lens L131, a negativelens L132, and a positive lens L133. Here, the second lens group G2 hasa glass combination to perform achromatization to peripheral rays, andthe third lens group G3 has a glass combination having two chromaticaberration correction portions to perform chromatization andachromatization, so that with combining the second lens group G2 and thethird lens group G3, lateral chromatic aberration in the visiblewavelength region and longitudinal chromatic aberration in the usingwavelength region are corrected, and in the ultraviolet wavelengthregion, a given amount of lateral chromatic aberration remains. In thescanning optical system 32, a plane PL (hereinafter called a pupilconjugate plane) conjugate with a pupil of the objective lens isdisposed in the scanning mechanism 31, and the image plane IMcorresponds to the image plane 13 in FIG. 1.

Then, conditions for constructing such a scanning optical system 32 areexplained. On the basis of Vh value defined by refractive indices nd atd-line and nh at h-line of an optical material constituting a lens, whenVh value of the positive lens (for example, double convex positive lensL131 in FIG. 2) that is disposed to the scanning mechanism 31 side (thepupil conjugate plane PL side) of the chromatic aberration correctionportion among the two chromatic aberration correction portionsconstituting the third lens group G3 is denoted by V31, similarly Vhvalue of the negative lens (for example, double concave negative lensL132 in FIG. 2) is denoted by V32, Vh value of the positive lens (forexample, double convex positive lens L133 in FIG. 2) constituting thechromatic aberration correction portion disposed to the objectiveoptical system side (image plane IM side) is denoted by V33, andsimilarly Vh value of the negative lens (for example, double concavenegative lens L132 in FIG. 2) is denoted by V34 (=V32), the scanningoptical system 32 is constructed by satisfying the following conditionalexpression (1) or (1A):V31>V32 and V33<V34  (1)V31<V32 and V33>V34  (1A)where Vh=1000×(nh−nd)/(nd−1).

Incidentally, Example shown in FIG. 2 satisfies conditional expression(1).

Conditional expression (1) is for effectively adjusting lateralchromatic aberration upon disposing two chromatic aberration correctionportions in the third lens group G3 (the lens configuration shown inFIG. 2 forms two chromatic aberration correction portions by theachromatic lens composed of three lenses). With satisfying conditionalexpression (1) or (1A), in the case shown in FIG. 2, in order from theobjective optical system side, achromatization is carried out by theboundary (the ninth surface in FIG. 2) between the positive lens L133and the negative lens L132, and chromatization is carried out by theboundary (the eighth surface in FIG. 2) between the negative lens L132and the positive lens L131. With this lens configuration, only lateralchromatic aberration in the specific wavelength in the ultravioletwavelength region is adjusted, and lateral chromatic aberration in theother wavelength regions can be corrected. Moreover, when glassmaterials are selected by satisfying conditional expression (1A),chromatization is carried out by the boundary between the positive lensL133 and the negative lens L132, and achromatization is carried out bythe boundary between the negative lens L132 and the positive lens L131,so that the similar effect can be obtained.

Similarly, the following conditional expression (2) is preferablysatisfied:V21<V22  (2)

where V21 denotes a dispersion ratio Vh of the positive lens L121constituting the second lens group G2, and V22 denotes a dispersionratio Vh of the negative lens L122 constituting the second lens groupG2.

Conditional expression (2) is a condition to constitute the second lensgroup G2 as an achromatic lens. With satisfying conditional expression(2), it becomes possible to carry out achromatization by the boundary(the fifth surface in FIG. 2) between the positive lens L121 and thenegative lens L122. Together with the configuration of the third lensgroup G3 defined by conditional expression (1) or (1A), furthereffective adjustment of lateral chromatic aberration can be realized.

In the scanning optical system 32, when values of Vh are V31>V32 andV33<V34, the following conditional expressions (3) through (7) arepreferably satisfied, and when values of Vh are V31<V32 and V33>V34, thefollowing conditional expressions (3) through (5), (6A) and (7A) arepreferably satisfied:−1.5<f/f2<0  (3)0.8<f/f3<1.8  (4)−30<V21−V22<−15  (5)+5<V31−V32<+15  (6)−30<V33−V34<−10  (7)−1.5<f/f2<0  (3)0.8<f/f3<1.8  (4)−30<V21−V22<−15  (5)−30<V31−V32<−10  (6A)+5<V33−V34<+15  (7A)where f denotes a focal length of the scanning optical system, f2denotes a focal length of the second lens group G2, and f3 denotes afocal length of the third lens group G3.

Conditional expressions (3) through (7) or (3) through (5), (6A) and(7A) are conditions that, in the scanning optical system 32, lateralchromatic aberration in the visible wavelength region and longitudinalchromatic aberration in the using wavelength region are corrected, and agiven amount of lateral chromatic aberration in the ultravioletwavelength region is remained. In Example shown in FIG. 2, conditionalexpressions (3) through (7) are satisfied.

The value of conditional expression (3) shows contribution of refractivepower of the second lens group G2 to the whole system, and obtains aneffect to carry out achromatization of the second lens group G2 togetherwith the following conditional expression (5). When refractive power ofthe second lens group G2 is within the scope of conditional expression(3), the value of conditional expression (5) becomes effective.

The value of conditional expression (4) shows contribution of refractivepower of the third lens group G3 to the whole system, and obtains aneffect to carry out achromatization of the third lens group G3 togetherwith the values of the following conditional expressions (6) or (6A),and (7) or (7A). When refractive power of the third lens group G3 iswithin the scope of conditional expression (4), values of conditionalexpressions (6) or (6A), and (7) or (7A) become effective.

The value of conditional expression (5) becomes negative, so that theboundary (the fifth surface) between the positive lens L121 and thenegative lens L122 of the second lens group G2 has an effect to carryout achromatization. When the value is equal to or falls below the lowerlimit of conditional expression (5), achromatization effect of lateralchromatic aberration in the second lens group G2 becomes excessive, andthe given amount of lateral chromatic aberration in the ultravioletwavelength region by means of chromatization effect of the third lensgroup G3 becomes difficult to obtain, so that it is undesirable. On theother hand, when the value is equal to or exceeds the upper limit ofconditional expression (5), achromatization effect of lateral chromaticaberration by the second lens group G2 becomes insufficient. As aresult, lateral chromatic aberration in the visible wavelength regionbecomes difficult to be excellently corrected, so that it isundesirable.

The value of conditional expression (6) becomes positive, so that theboundary, (the eighth surface) between the positive lens L131 and thenegative lens L132, which composes chromatic aberration correctionportion locating to the scanning mechanism 31 side of the third lensgroup G3 has an effect to carry out chromatization. When the value isequal to or falls below the lower limit of conditional expression (6),chromatization effect of lateral chromatic aberration at the boundarybetween the positive lens L131 and the negative lens L132 becomesinsufficient. As a result, it becomes difficult to obtain a given amountof lateral chromatic aberration in the ultraviolet wavelength region, sothat it is undesirable. On the other hand, when the value is equal to orexceeds the upper limit of conditional expression (6), chromatizationeffect of lateral chromatic aberration at the boundary between thepositive lens L131 and the negative lens L132 becomes excessive. As aresult, it becomes difficult to excellently correct lateral chromaticaberration in the visible wavelength region, so that it is undesirable.

The value of conditional expression (7) becomes negative, so that theboundary, (the ninth surface) between the negative lens L132 and thepositive lens L133, which forms a chromatic aberration correctionportion locating to the objective optical system side of the third lensgroup G3 has an effect to carry out achromatization. When the value isequal to or falls below the lower limit of conditional expression (7),achromatization effect of lateral chromatic aberration at the boundarybetween the negative lens L132 and the positive lens L133 becomesexcessive. As a result, it becomes difficult to obtain the given amountof lateral chromatic aberration in the ultraviolet wavelength region bymeans of chromatization effect of lateral chromatic aberration at theboundary between the positive lens L131 and the negative lens L132, sothat it is undesirable. On the other hand, the value is equal to orexceeds the upper limit of conditional expression (7), achromatizationeffect of lateral chromatic aberration at the boundary between thenegative lens L132 and the positive lens L133 becomes insufficient. As aresult, it becomes difficult to excellently correct lateral chromaticaberration in the visible wavelength region, so that it is undesirable.Moreover, when the value cannot satisfy conditional expression (7), notonly lateral chromatic aberration, but also longitudinal chromaticaberration in the using wavelength region difficult to be corrected, sothat it is undesirable.

In the case of conditional expressions (6A) and (7A), contrary to theabove-described case, the boundary, between the positive lens L131 andthe negative lens L132, which forms chromatic aberration correctionportion locating to the scanning mechanism 31 side has an effect ofachromatization, and the boundary, between the negative lens L132 andthe positive lens L133, which forms chromatic aberration correctionportion locating to the objective optical system side has an effect ofchromatization. When the value departs from the scope of the conditionalexpression, the phenomenon is the same as described above.

Moreover, the scanning optical system 32 according to the presentembodiment preferably satisfies the following conditional expression (8)when V31>V32 and V33<V34, or conditional expression (8A) when V31<V32and V33>V34:−0.1<N31−N32<+0.1  (8)−0.1<N33−N34<+0.1  (8A)where N31 denotes a refractive index at d-line of the positive lens L131constituting chromatic aberration correction portion of the scanningmechanism 31 side among two chromatic aberration correction portions ofthe third lens group G3, N32 similarly denotes a refractive index atd-line of the negative lens L132, N33 denotes a refractive index atd-line of the positive lens L133 constituting chromatic aberrationcorrection portion of the objective optical system side among twochromatic aberration correction portions of the third lens group, andN34 (=N32) similarly denotes a refractive index at d-line of thenegative lens L132. In FIGS. 2 and 4, each of N32 and N34 is arefractive index at d-line of the negative lens L132, and Example shownin FIG. 2 satisfies conditional expression (8).

Conditional expressions (8) and (8A) are conditions that, in thescanning optical system 32, lateral chromatic aberration in the visiblewavelength region and longitudinal chromatic aberration in the usingwavelength region are corrected, and in the ultraviolet wavelengthregion a given amount of lateral chromatic aberration is remained andthe rest of various aberrations are excellently corrected. When thevalue departs from the scope of conditional expression (8) or (8A),refractive power of the boundary (the eighth surface) between thepositive lens L131 and the negative lens L132 or the boundary (the ninthsurface) between the negative lens L132 and the positive lens L133becomes strong. As a result, because of chromatization effect of lateralchromatic aberration, it becomes difficult to correct lateral chromaticaberration in the visible wavelength region and to remain a given amountof lateral chromatic aberration in the ultraviolet wavelength regionwithout affecting to correction of various aberrations, so that it isundesirable.

In the scanning optical system 32 according to the present embodiment,the following conditional expression (9) is preferably satisfied:SD/f<0.85  (9)where SD denotes a distance between the scanning mechanism 31 side(pupil conjugate surface PL side) surface (the second surface in FIG. 2)of the first lens group G1 and the object side (objective optical systemor the image plane IM side) surface (the tenth surface in FIG. 2) of thethird lens group G3, and f denotes a focal length of the scanningoptical system 32.

Upon using the scanning optical system 32 in a confocal scanningmicroscope 1, conditional expression (9) is for preventing the scanningoptical system 32 from affecting to the other components of the confocalscanning microscope 1. When the value departs from the scope ofconditional expression (9), the scanning optical system 32 becomeslarge, so that configuration of the scanning mechanism (such as agalvanometer mirror) 31 disposed to the pupil conjugate plane PL side isrestricted. The scanning mechanism (such as a galvanometer mirror) 31 istried to be disposed without satisfying conditional expression (9),configuration of the scanning optical system 32 cannot be achieved bythe above-described positive-negative-positive three-lens configuration.In this case, the lens configuration becomes a telephoto type, in whichnegative refractive power comes to the image plane side, so that itbecomes difficult to excellently correct lateral chromatic aberration inthe visible wavelength region with remaining a given amount of lateralchromatic aberration in the ultraviolet wavelength region. Accordingly,it is undesirable.

Then, specific examples (scanning optical systems 132 through 632) ofthe scanning optical system 32 as described above are explained below.

Example 1

FIG. 2 is a diagram showing a lens configuration of a scanning opticalsystem 132 according to Example 1 that is used in a confocal scanningmicroscope 1. The scanning optical system 132 according to the Example 1is composed of, in order from a pupil conjugate plane PL side, a firstlens group G1 composed of a double convex positive lens L111, a secondlens group G2 composed of a cemented lens having negative refractivepower constructed by a double convex positive lens L121 cemented with adouble concave negative lens L122, and a third lens group G3 havingpositive refractive power composed of a cemented lens constructed by adouble convex positive lens L131 cemented with a double concave negativelens L132 cemented with a double convex positive lens L133. In Example1, the third lens group G3 is composed of a cemented lens constructed bythree lenses of a positive-negative-positive configuration, and thenegative lens (double concave negative lens L132) locating at the centeris commonly used in two chromatic aberration correction portions. Theabove-described scanning mechanism (such as a galvanometer mirror) 31 isdisposed in the vicinity of the pupil conjugate plane PL.

Various values associated with the scanning optical system according toExample 1 are listed in Table 1. In Table 1, f denotes a focal length ofthe scanning optical system 132, i denotes a surface number counted inorder from the pupil conjugate plane PL side, r denotes a radius ofcurvature of the lens surface, d denotes a distance between lenssurfaces, N(d) denotes a refractive index at d-line (587.6 nm), N(h)denotes refractive index at h-line (404.7 nm), v denotes an Abbe number.“r=0.0000” denotes a plane surface. The explanation of reference symbolsis the same in the other Examples.

TABLE 1 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 44.05001.000000 PL 2 63.0470 4.0000 71.31 1.569070 1.582580 L111 3 −269.976014.5000 1.000000 4 45.1530 5.0000 82.56 1.497820 1.507940 L121 5−37.0010 1.5000 39.68 1.654115 1.683310 6 32.0110 7.0000 1.000000 736.0120 7.5000 35.30 1.592700 1.623340 L131 8 −27.0080 1.5000 44.271.613397 1.637555 9 27.0080 7.5000 82.56 1.497820 1.507940 L133 10 −47.8020 35.4085 1.000000 (Values for Conditional Expressions) (1): V31= 51.7, V32(=V34) = 39.4, V33 = 20.3 (2): V21 = 20.3, V22 = 44.6 (3):f/f2 = −0.76 (4): f/f3 = 1.24 (5): V21 − V22 = −24.3 (6): V31 − V32 =12.3 (7): V33 − V32 = −19.1 (8): N31 − N32 = −0.02 (9): SD/f = 0.81

As described above, Example 1 satisfies all conditional expressions (1)through (9).

FIG. 3 shows various aberrations of the scanning optical systemaccording to Example 1. In respective graphs, NA denotes a numericalaperture in the image plane side, Y denotes an image height, d denotesan aberration curve at d-line (wavelength λ=587.6 nm), and h denotes anaberration curve at h-line (wavelength λ=404.7 nm), C denotes anaberration curve at C-line (wavelength λ=656.3 nm), and F denotes anaberration curve at F-line (wavelength λ=486.1 nm). The above-describedexplanation regarding various aberration graphs is the same as the otherExamples. As is apparent from FIG. 3, lateral chromatic aberration inh-line becomes a given amount and the other aberrations are excellentlycorrected.

Example 2

FIG. 4 is a diagram showing a lens configuration of a scanning opticalsystem 232 according to Example 2 that is used in a confocal scanningmicroscope 1. The scanning optical system 232 according to Example 2 iscomposed of, in order from the pupil conjugate plane PL side, a firstlens group G1 composed of a double convex positive lens L211, a secondlens group G2 having negative refractive power composed of a cementedlens constructed by a double convex positive lens L221 cemented with adouble concave negative lens L222, and a third lens group G3 havingpositive refractive power composed of a cemented lens constructed by adouble convex positive lens L231 cemented with a double concave negativelens L232 cemented with a double convex positive lens L233. In thisExample 2 also, the third lens group G3 is composed of a cemented lensconstructed by three lenses of a positive-negative-positiveconfiguration, and the negative lens (double concave negative lens L232)locating at the center is commonly used in two chromatic aberrationcorrection portions. The above-described scanning mechanism (such as agalvanometer mirror) 31 is disposed in the vicinity of the pupilconjugate plane PL.

Various values associated with the scanning optical system according toExample 2 are listed in Table 2. Various aberration curves of thescanning optical system 232 according to Example 2 are shown in FIG. 5.

TABLE 2 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 59.95001.000000 PL 2 116.6840 4.0000 71.31 1.569070 1.582580 L211 3 −116.68406.0000 1.000000 4 58.9500 6.0000 82.56 1.497820 1.507940 L221 5 −40.41501.5000 39.68 1.654115 1.683310 L222 6 40.4150 2.4000 1.000000 7 36.63008.5000 35.30 1.592700 1.623340 L231 8 −27.1000 1.5000 44.27 1.6133971.637555 L232 9 27.1000 8.0000 82.56 1.497820 1.507940 L233 10  −55.530042.0667 1.000000 (Values for Conditional Expressions) (1): V31 = 51.7,V32(=V34) = 39.4, V33 = 20.3 (2): V21 = 20.3, V22 = 44.6 (3): f/f2 =−0.65 (4): f/f3 = 1.15 (5): V21 − V22 = −24.3 (6): V31 − V32 = 12.3 (7):V33 − V32 = −19.1 (8): N31 − N32 = −0.02 (9): SD/f = 0.63

As described above, Example 2 satisfies all conditional expressions (1)through (9). Lateral chromatic aberration in h-line becomes a givenamount and the other aberrations are excellently corrected.

Example 3

FIG. 6 is a diagram showing a lens configuration of a scanning opticalsystem 332 according to Example 3 that is used in a confocal scanningmicroscope 1. The scanning optical system 332 according to Example 3 iscomposed of, in order from the pupil conjugate plane PL side, a firstlens group G1 composed of a double convex positive lens L311, a secondlens group G2 having negative refractive power composed of a cementedlens constructed by a double convex positive lens L321 cemented with adouble concave negative lens L322, and a third lens group G3 havingpositive refractive power composed of a double convex positive lensL331, a double concave negative lens L332 and a double convex positivelens L333 each having a given air space in between. In Examples 1 and 2,the third lens group G3 is constructed by a cemented lens composed ofthree lenses. However in Example 3, each of three lenses with positive,negative and positive refractive power is disposed with a given airspace in between, and the negative lens (a double concave negative lensL332) located at the center is commonly used at two chromatic aberrationcorrection portions. The above-described scanning mechanism (such as agalvanometer mirror) 31 is disposed in the vicinity of the pupilconjugate plane PL.

Various values associated with the scanning optical system according toExample 3 are listed in Table 3. Various aberration curves of thescanning optical system 332 according to Example 3 are shown in FIG. 7.

TABLE 3 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 44.05001.000000 PL 2 53.5046 4.0000 71.31 1.569070 1.582580 L311 3 −156.64799.0000 1.000000 4 125.7420 5.0000 82.56 1.497820 1.507940 L321 5−24.9741 2.0000 39.68 1.654115 1.683310 L322 6 51.0623 5.0000 1.000000 754.0857 6.0000 35.30 1.592700 1.623340 L331 8 −25.4046 1.5000 1.000000 9−23.0725 2.0000 44.27 1.613397 1.637555 L332 10  45.3109 1.5000 1.00000011  41.1037 6.0000 82.56 1.497820 1.507940 L333 12  −39.7647 37.57231.000000 (Values for Conditional Expressions) (1): V31 = 51.7, V32(=V34)= 39.4, V33 = 20.3 (2): V21 = 20.3, V22 = 44.6 (3): f/f2 = −0.89 (4):f/f3 = 1.11 (5): V21 − V22 = −24.3 (6): V31 − V32 = 12.3 (7): V33 − V32= −19.1 (8): N31 − N32 = −0.02 (9): SD/f = 0.7

As described above, Example 3 satisfies all conditional expressions (1)through (9). Lateral chromatic aberration in h-line becomes a givenamount and the other aberrations are excellently corrected.

Example 4

FIG. 8 is a diagram showing a lens configuration of a scanning opticalsystem 432 according to Example 4 that is used in a confocal scanningmicroscope 1. The scanning optical system 432 according to Example 4 iscomposed of, in order from a pupil conjugate plane PL side, a first lensgroup G1 composed of a double convex positive lens L411, a second lensgroup G2 having negative refractive power composed of a cemented lensconstructed by a positive meniscus lens L421 having a convex surfacefacing the object side cemented with a negative meniscus lens L422having a convex surface facing the object side, and a third lens groupG3 having positive refractive power composed of a cemented lensconstructed by a double convex positive lens L431 cemented with a doubleconcave negative lens L432 and a double convex positive lens L433disposed with a given air space from the cemented lens. In Example 4,among two chromatic aberration correction portions provided in the thirdlens group G3, the chromatic aberration correction portion located tothe scanning mechanism 31 side is constructed by a cemented lens, andthe chromatic aberration correction portion located to the objectiveoptical system side is constructed by two lenses with an air space inbetween. In this case also, a negative lens (a double concave negativelens L432) located at the center is commonly used in the two chromaticaberration correction portions. The above-described scanning mechanism31 (such as a galvanometer mirror) is disposed in the vicinity of thepupil conjugate plane PL.

Various values associated with Example 4 are listed in Table 4. Variousaberration curves of the scanning optical system 432 according toExample 4 are shown in FIG. 9.

TABLE 4 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 33.40001.000000 PL 2 105.2751 4.0000 71.31 1.569070 1.582580 L411 3 −203.701716.0000 1.000000 4 23.0910 5.0000 82.56 1.497820 1.507940 L421 5991.4499 1.5000 44.27 1.613397 1.637555 L422 6 22.4488 5.0000 1.000000 738.2234 8.0000 95.02 1.434250 1.441870 L431 8 −23.3951 1.5000 44.271.613397 1.637555 L432 9 39.5955 2.0000 1.000000 10  41.5815 6.000035.30 1.592700 1.623340 L433 11  −44.7624 35.1879 1.000000 (Values forConditional Expressions) (1A): V31 = 17.5, V32(=V34) = 39.4, V33 = 51.7(2): V21 = 20.3, V22 = 39.4 (3): f/f2 = −0.19 (4): f/f3 = 0.95 (5): V21− V22 = −19.1 (6A): V31 − V32 = −21.9 (7A): V33 − V32 = 12.3 (8A): N33 −N34 = −0.02 (9): SD/f = 0.817

As shown in Example 4, conditional expressions (1A) through (5), (6A),(7A), (8A) and (9) are all satisfied, lateral chromatic aberration inh-line becomes a given amount, and the other aberrations are excellentlycorrected.

Example 5

FIG. 10 is a diagram showing a lens configuration of a scanning opticalsystem 532 according to Example 5 that is used in a confocal scanningmicroscope 1. The scanning optical system 532 according to Example 5 iscomposed of, in order from a pupil conjugate plane PL side, a first lensgroup G1 composed of a double convex positive lens L511, a second lensgroup G2 having negative refractive power composed of a cemented lensconstructed by a double convex positive lens L521 cemented with a doubleconcave negative lens L522, and a third lens group G3 having positiverefractive power composed of a cemented lens constructed by a doubleconvex positive lens L531 cemented with a double concave negative lensL532 and with an air space from the cemented lens, a cemented lensconstructed by a double concave negative lens L533 cemented with adouble convex positive lens L534. In Example 5, two chromatic aberrationcorrection portions provided in the third lens group G3 are constructedby two cemented lenses located with an air space in between. Theabove-described scanning mechanism 31 (such as a galvanometer mirror) isdisposed in the vicinity of the pupil conjugate plane PL.

Various values associated with Example 5 are listed in Table 5. Variousaberration curves of the scanning optical system 532 according toExample 5 are shown in FIG. 11.

TABLE 5 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 44.05001.000000 PL 2 74.7431 3.5000 71.31 1.569070 1.582580 L511 3 −72.39728.0000 1.000000 4 51.8926 6.0000 82.56 1.497820 1.507940 L521 5 −21.12961.5000 44.27 1.613397 1.637555 L522 6 22.4626 5.0000 1.000000 7 28.89125.0000 35.30 1.592700 1.623340 L531 8 −80.0000 1.5000 44.27 1.6133971.637555 L532 9 100.0000 3.0000 1.000000 10  −441.3645 1.5000 57.031.622800 1.641330 L533 11  47.9590 7.0000 95.02 1.434250 1.441870 L53412  −26.5887 37.4560 1.000000 (Values for Conditional Expressions) (1):V31 = 51.7, V32 = 39.4, V33 = 17.5, V34 = 29.8 (2): V21 = 20.3, V22 =39.4 (3): f/f2 = −1.31 (4): f/f3 = 1.40 (5): V21 − V22 = −19.1 (6): V31− V32 = 12.3 (7): V33 − V34 = −12.3 (8): N31 − N32 = −0.02 (9): SD/f =0.7

As shown in Example 5, conditional expressions (1) through (9) are allsatisfied, lateral chromatic aberration in h-line becomes a givenamount, and the other aberrations are excellently corrected.

Example 6

FIG. 12 is a diagram showing a lens configuration of a scanning opticalsystem 632 according to Example 6 that is used in a confocal scanningmicroscope 1. The scanning optical system 632 according to Example 6 iscomposed of, in order from a pupil conjugate plane PL side, a first lensgroup G1 composed of a double convex positive lens L611, a second lensgroup G2 having negative refractive power composed of a cemented lensconstructed by a double convex positive lens L621 cemented with a doubleconcave negative lens L622, and a third lens group G3 having positiverefractive power composed of a cemented lens constructed by a doubleconvex positive lens L631 cemented with a double convex positive lensL632, and with a given air space from the cemented lens, a cemented lensconstructed by a double convex positive lens L633 cemented with anegative meniscus lens L634 having a concave surface facing the pupilconjugate plane PL side. In Example 6 also, two chromatic aberrationcorrection portions provided in the third lens group are constructed bytwo pairs of two-lens cemented lenses provided with an air space inbetween. The above-described scanning mechanism 31 (such as agalvanometer mirror) is disposed in the vicinity of the pupil conjugateplane PL.

Various values associated with Example 6 are listed in Table 6. Variousaberration curves of the scanning optical system 632 according toExample 6 are shown in FIG. 13.

TABLE 6 f = 60 i r d ν N(d) N(h) 0.0000 1.000000 1 0.0000 33.40001.000000 PL 2 81.6286 3.5000 60.68 1.603110 1.619870 L611 3 −108.243611.0000 1.000000 4 50.0352 4.0000 82.56 1.497820 1.507940 L621 5−603.8140 1.5000 44.27 1.613397 1.637555 L622 6 25.3140 5.0000 1.0000007 23.2075 8.5000 82.56 1.497820 1.507940 L631 8 −22.0748 1.5000 44.271.613397 1.637555 L632 9 38.5948 3.0000 1.000000 10  101.3889 8.500038.02 1.603420 1.631960 L633 11  −15.6300 1.5000 44.27 1.613397 1.637555L634 12  −42.5592 33.7281 1.000000 (Values for Conditional Expressions)(1A): V31 = 20.3, V32 = 39.4, V33 = 47.3, V34 = 39.4 (2): V21 = 20.3,V22 = 39.4 (3): f/f2 = −0.82 (4): f/f3 = 1.16 (5): V21 − V22 = −19.1(6A): V31 − V32 = −19.1 (7A): V33 − V32 = 7.9 (8A): N33 − N34 = −0.01(9): SD/f = 0.8

As shown in Example 6, conditional expressions (1A), (2) through (5),(6A), (7A), (8A) and (9) are all satisfied, lateral chromatic aberrationin h-line becomes a given amount, and the other aberrations areexcellently corrected.

What is claimed is:
 1. A confocal scanning microscope comprising: anapochromat objective optical system that converges illumination light ona sample, forms a first image plane locating at a conjugate positionwith the sample, and corrects lateral chromatic aberration over anentire visible wavelength range; a scanning mechanism that scans theillumination light on a surface of the sample; and a scanning opticalsystem that is provided between the scanning mechanism and the firstimage plane formed by the apochromat objective optical system; thescanning optical system being composed of, in order from the scanningmechanism side, a first lens group, a second lens group, and a thirdlens group, wherein the first lens group has positive refractive power,the second lens group has negative refractive power, and the third lensgroup has positive refractive power, the third lens group has first andsecond chromatic aberration correction portions, each formed by apositive lens and a negative lens adjoining each other or by a negativelens and a positive lens adjoining each other, the first chromaticaberration correction portion being configured to carry outchromatization, and the second chromatic aberration correction portionbeing configured to carry out achromatization, and the first and secondchromatic aberration correction portions correct lateral chromaticaberration generated in an ultraviolet wavelength region by theapochromat objective optical system.